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Microwave plasma treatment system
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Technical parameters Related Products
Number Content Specification Parameters
1 Project Solid state source version/Magnetron version
2 Output power 250W×8/1.25kW×2
3 OUTPUT FREQUENCY 2400MHz-2500MHz adjustable/2450MHz ± 25MHz
4 Frequency error ±50ppm/1-2%
5 Microwave leakage ≤2mW/cm2
6 Cooling method water-cooling
7 Process Gas Ar, O2, H2, CF4, etc
8 Plasma treatment area 0.19m2/0.15m2

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